Title of Invention

"SEMICONDUCTOR APPARATUS AND METHOD OF ASSEMBLING THE SAME"

Abstract In a semiconductor apparatus, a plurality of light-triggered type semiconductor devices, each having a groove for burying of an optical fiber for supplying an optical gate signal to a housing of the light-triggered type semiconductor device, are connected in series. Device cooling heat sinks, each having a flow path for circulating a coolant medium and a coolant inlet and a coolant outlet communicating with the flow path, are disposed on both sides of the housing of each light-triggered type semiconductor device. The light-triggered type semiconductor devices and the device cooling heat sinks are coupled into a single structure. An optical fiber insertion groove, which corresponds in position to the groove of the housing, is provided on a side surface of the device cooling heat sink, which contacts a groove (4)-side surface of the housing of the light-triggered type semiconductor device.
Full Text TITLE OF THE INVENTION SEMICONDUCTOR APPARATUS AND METHOD OF ASSEMBLING THE SAME
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor apparatus that is configured such that device cooling heat sinks are disposed on both sides of a light-triggered type semiconductor device to thereby cool the light-triggered type semiconductor device, and to a method of assembling the semiconductor apparatus
In a conventional semiconductor apparatus using light-triggered type semiconductor devices, as shown in FIG 1, an n-number of light-triggered type semiconductor devices 11 to In are connected in series Optical gate signals 101 to lOn are generated from a gate signal generating device 3 and supplied to the light-triggered type semiconductor devices 11 to In through optical fibers 21 to 2n
Each of the light-triggered type semiconductor devices 11 to In is configured as shown in FIG 2A and FIG 2B Specifically, the light-triggered type semiconductor device 1, as shown in FIGS 2A and 2B, has a circular housing la A circular silicon wafer 5 is concentrically disposed within the housing la An L-shaped groove 4 is formed on an upper surface of the housing la The L-shaped groove 4 extends radially outward from the center of the upper surface of the
housing la, and also the L-shaped groove 4 extends from the center of the upper surface of the housing la toward the center of the silicon wafer 5 In addition, a cooling fin lb is provided on an outer peripheral portion of the lower part of the housing la
An optical fiber 2 for guiding the optical gate signal 10 to the silicon wafer 5 is buried in the L-shaped groove 4 that is formed in the housing la
The optical fiber 2, as shown in FIG 3, comprises a metal pipe portion 6 that corresponds in shape to the L-shaped groove 4 that is formed in the housing la, an insulating sheath portion 7 that is connected to the metal pipe portion 6 via a coupler and secures insulation between a high voltage part and a low-voltage part, and an optical fiber portion 8 that is passed through the metal pipe portion 6 and insulating sheath portion 7 and transmits the optical gate signal
FIG 4 shows the state in which the metal pipe portion 6 of the optical fiber 2 is buried in the L-shaped groove 4 that is formed in the housing la of the light-triggered type semiconductor device 1 shown in FIG 2A and FIG 2B
Thus, if an optical gate signal is generated from the gate signal generating device 3, the optical gate signal is sent to the silicon wafer 5 within the housing la through the optical fiber portion 8
The above-described light-triggered type
semiconductor device 1 and optical fiber 2 constitute one device unit In the case where the n-number of light-triggered type semiconductor devices 11 to In are connected in series, as shown in FIG 1, device cooling heat sinks 9 are disposed so as to sandwich both side surfaces of each light-triggered type semiconductor device, 11 to 11a, as shown in FIG 5, and the heat sinks 9 and semiconductor devices 11 to 11a are coupled into an integral structure In this case, as shown in FIG 6, the optical fiber (2)-side surface of the light-triggered type semiconductor device 1 is put in close contact with the side surface of the associated device cooling heat sink 9
The device cooling heat sink 9 includes a water inlet 9a and a water outlet 9b for supplying and draining cooling water, which are provided at one end face of the heat sink 9, and a flow path 9c through which the cooling water is circulated to cool the heat that is produced from each device
As has been described above, in the conventional semiconductor apparatus, the optical fiber 2 is first buried in the groove 4 that is formed in the housing of each light-triggered type semiconductor device 1, following which the heat sinks 9 are disposed so as to sandwich both side surfaces of the light-triggered type semiconductor device 1 Consequently, when the semiconductor devices and heat sinks are coupled into
the integral structure, the work for coupling has to be conducted in the state in which the optical fibers 2 are led out of the light-triggered type semiconductor devices 1 Thus, there is the problem that the work for coupling is difficult
In addition, if the optical fiber 2 is damaged and a need for replacement of the optical fiber 2 arises after the light-triggered type semiconductor devices 1 and heat sinks 9 are coupled into the integral structure, the integral structure has to be disassembled The work for this requires a great deal of time and labor
BRIEF SUMMARY OF THE INVENTION
The present invention has been made in order to solve the above problems, and the object of the invention is to provide a semiconductor apparatus and a method of assembling the semiconductor apparatus, which can facilitate the work for coupling light-triggered type semiconductor devices and heat sinks and can also facilitate replacement of optical fibers
In order to achieve the above object, the present invention has the following structures
(1) There is provided a semiconductor apparatus in which a plurality of light-triggered type semiconductor devices, each having a groove for burying of an optical fiber for supplying an optical gate signal to a housing of the light-triggered type semiconductor
device, are connected in series, and device cooling heat sinks, each having a flow path for circulating a coolant medium and a coolant inlet and a coolant outlet communicating with the flow path, are disposed on both sides of the housing of each light-triggered type semiconductor device, the light-triggered type semiconductor devices and the device cooling heat sinks being coupled into a single structure, wherein an optical fiber insertion groove, which corresponds in position to the groove of the housing, is provided on a side surface of the device cooling heat sink, which contacts a groove-side surface of the housing of the light-triggered type semiconductor device
(2) In the semiconductor apparatus according to the above item 1, the coolant flow path that is formed within the device cooling heat sink is provided along a surrounding part of the optical fiber insertion groove
(3) There is provided a method of assembling
a semiconductor apparatus, comprising connecting in series a plurality of light-triggered type semiconductor devices, each having a groove for burying of an optical fiber for supplying an optical gate signal to a housing of the light-triggered type semiconductor device, disposing device cooling heat sinks, each having a flow path for circulating a coolant medium and a coolant inlet and a coolant outlet communicating with the flow path, on both sides of the housing of each
light-triggered type semiconductor device, coupling the light-triggered type semiconductor devices and the device cooling heat sinks into a single structure, and burying and attaching, thereafter, the optical fiber in the groove formed in the housing, while inserting the optical fiber through an optical fiber insertion groove, the optical fiber insertion groove, which corresponds in position to the groove of the housing, being provided on a contact surface of the device cooling heat sink, which contacts a groove-side surface of the housing of the light-triggered type semiconductor device
According to the present invention, optical fibers can be attached to light-triggered type semiconductor devices after the light-triggered type semiconductor devices and device cooling heat sinks are coupled into a single structure Thus, the work efficiency is enhanced, and even if the optical fiber is damaged, it can easily be replaced
Moreover, the flow path for circulating a coolant within the heat sink is provided along the surrounding part of the optical fiber insertion groove Thereby, the efficiency of cooling the light-triggered type semiconductor device can be improved
Additional objects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be
learned by practice of the invention The objects and advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out hereinafter BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention, and together with the general description given above and the detailed description of the embodiments given below, serve to explain the principles of the invention
FIG 1 shows the structure of a 1-phase part of a conventional semiconductor apparatus,
FIG 2A is a front view of a light-triggered type semiconductor device,
FIG 2B is a plan view of the light-triggered type semiconductor device,
FIG 3 shows the structure of an optical fiber that is attached to the light-triggered type semiconductor device,
FIG 4 is a front view that shows the state in which the optical fiber is attached to the light-triggered type semiconductor device,
FIG 5 shows a single structure in which light-triggered type semiconductor devices and device cooling heat sinks are coupled,
FIG 6 is a cross-sectional view taken along line
A-A' in FIG 5,
FIG 7A is a front view of a device cooling heat sink in a first embodiment of the semiconductor apparatus according to the present invention, and FIG 7B is a plan view of the device cooling heat sink in the first embodiment of the semiconductor apparatus according to the invention,
FIG 8 is a cross-sectional view that shows a contact part between the device cooling heat sink and the light-triggered type semiconductor device in the first embodiment,
FIG 9A is a front view of a device cooling heat sink in a second embodiment of the semiconductor apparatus according to the present invention, and FIG 9B is a plan view of the device cooling heat sink in the second embodiment of the semiconductor apparatus according to the invention, and
FIG 10 is a cross-sectional view that shows a contact part between the device cooling heat sink and the light-triggered type semiconductor device in the second embodiment
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will now be described with reference to the accompanying drawings Structural parts that are common to those shown in FIG 1 to FIG 6 are denoted by like reference numerals, and a description thereof is omitted
FIG 7A is a front view of a device cooling heat sink in a first embodiment of the semiconductor apparatus according to the present invention FIG 7B is a plan view of the device cooling heat sink in the first embodiment of the semiconductor apparatus according to the invention
FIG 8 is a cross-sectional view, which corresponds to a cross section taken along line A-A' in FIG 5, and shows a contact part between the device cooling heat sink and the light-triggered type semiconductor device in the first embodiment
In the first embodiment, as shown in FIG 7A, FIG 7B and FIG 8, an optical fiber insertion groove 91d, which corresponds in position to a groove 4 of a housing la, is formed on that side surface of a device cooling heat sink 91, which contacts a groove (4)-side surface of the housing la of the light-triggered type semiconductor device 1
In this case, the device cooling heat sink 91 has a greater wall thickness than the device cooling heat sink 9 shown in FIG 5 The device cooling heat sink 91 includes a water inlet 91a and a water outlet 91b for supplying and draining cooling water, which are provided at one end face of the heat sink 91, and a flow path 91c through which the cooling water is circulated to cool the heat that is produced from each device Thus, the groove 91d of a size enough to
insert the optical fiber 4 can be formed in the thick wall part of the device cooling heat sink 91, without the groove 91d intersecting the flow path 91c
In the state in which the optical fiber 4 is not attached, the device cooling heat sinks 91 are disposed to sandwich both side surfaces of the housing la of each light-triggered type semiconductor device 1, like the structure shown in FIG 5 The heat sinks 91 and semiconductor devices 1 are thus coupled into a single integral structure In this case, the side surface of the housing la is put in close contact with the side surface of the associated device cooling heat sink 91, and the optical fiber insertion groove 91d is formed at a position corresponding to the groove 4 of the housing la The optical fiber insertion groove 91d is formed such that the optical fiber 2 (shown in FIG 3) having the metal pipe portion 6, which corresponds in shape to the L-shaped groove 4 of the housing la, can be inserted in a hole that is defined by the optical fiber insertion groove 91d and the groove 4 formed in the side surface of the housing la of the light-triggered type semiconductor device 1
Subsequently, the optical fiber 2 is inserted through the optical fiber insertion groove 91d, and the optical fiber 2 is buried in the groove 4 formed in the side surface of the housing la of the light-triggered type semiconductor device 1 Thereby, the optical
fiber 2 is attached to the light-triggered type semiconductor device 1
As has been described above, according to the first embodiment of the invention, the optical fiber insertion groove 91d, which corresponds in position to the groove 4 of the housing la, is formed in that side surface of the device cooling heat sink 91, which contacts the groove (4)-side surface of the housing la of the light-triggered type semiconductor device 1 Thereby, after the light-triggered type semiconductor devices 1 and device cooling heat sinks 91 are coupled into the single structure, the optical fibers 2 can be attached to the light-triggered type semiconductor devices 1 through the optical fiber insertion grooves 91d
When the heat sinks 91 are disposed to sandwich both side surfaces of the housing la of each light-triggered type semiconductor device 1 and the heat sinks 91 and light-triggered type semiconductor devices 1 are coupled into the single structure, the optical fiber 2 is yet to be attached Therefore, the work efficiency is enhanced, and even if the optical fiber 2 is damaged, it can easily be replaced
FIG 9A is a front view of a device cooling heat sink in a second embodiment of the semiconductor apparatus according to the present invention FIG 9B is a plan view of the device cooling heat sink in the
second embodiment of the semiconductor apparatus according to the invention
FIG 10 is a cross-sectional view, which corresponds to a cross section taken along line A-A' in FIG 5, and shows a contact part between the device cooling heat sink and the light-triggered type semiconductor device in the second embodiment
In the second embodiment, as shown in FIG 9A, FIG 9B and FIG 10, an optical fiber insertion groove 91d, which corresponds in position to the groove 4 of the housing la, is formed on that side surface of the device cooling heat sink 91, which contacts the groove (4)-side surface of the housing la of the light-triggered type semiconductor device 1 In addition, a flow path 91c is provided within the device cooling heat sink 91 in a curved shape along the surrounding part of the optical fiber insertion groove 91d
With this structure of the device cooling heat sink 91, like the first embodiment, after the light-triggered type semiconductor devices 1 and device cooling heat sinks 91 are coupled into the single structure, the optical fibers 2 can be attached to the light-triggered type semiconductor devices 1 through the optical fiber insertion grooves 91d
When the heat sinks 91 are disposed to sandwich both side surfaces of the housing la of each light-triggered type semiconductor device 1 and the heat
sinks 91 and light-triggered type semiconductor devices 1 are coupled into the single structure, the optical fiber 2 is yet to be attached Therefore, the work efficiency is enhanced, and even if the optical fiber 2 is damaged, it can easily be replaced
Furthermore, the flow path 91c, which is formed within the device cooling heat sink 91, is provided along the surrounding part of the optical fiber insertion groove 91d Thus, the coolant can be circulated in the vicinity of the contact surface between the light-triggered type semiconductor device 1 and the associated device cooling heat sink 91 Therefore, the efficiency of cooling the light-triggered type semiconductor device 1 can be improved
Additional advantages and modifications will readily occur to those skilled in the art Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described herein Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents
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WHAT IS CLAIMED IS:
1. A semiconductor apparatus in which a plurality
of light-triggered type semiconductor devices, each
having a groove for burying of an optical fiber for
supplying an optical gate signal to a housing of the
light-triggered type semiconductor device, are
connected in series, and device cooling heat sinks,
each having a flow path for circulating a coolant
medium and a coolant inlet and a coolant outlet
communicating with the flow path, are disposed on both
sides of the housing of each light-triggered type
semiconductor device, the light-triggered type
semiconductor devices and the device cooling heat sinks
being coupled into a single structure, wherein an
optical fiber insertion groove, which corresponds in
position to the groove of the housing, is provided on
a side surface of the device cooling heat sink, which contacts a groove-side surface of the housing of the light-triggered type semiconductor device.
2. The semiconductor apparatus according to
claim 1, wherein the coolant flow path that is formed
within the device cooling heat sink is provided along a
surrounding part of the optical fiber insertion groove.
3. The semiconductor apparatus according to
claim 1, wherein the optical fiber insertion groove is
formed such that the optical fiber is insertable in
a hole that is defined by the optical fiber insertion

groove and the groove formed in the housing.
4. A method of assembling a semiconductor
apparatus, comprising:
connecting in series a plurality of light-triggered type semiconductor devices, each having a groove for burying of an optical fiber for supplying an optical gate signal to a housing of the light-triggered type semiconductor device;
disposing device cooling heat sinks, each having a flow path for circulating a coolant medium and a coolant inlet and a coolant outlet communicating with the flow path, on both sides of the housing of each light-triggered type semiconductor device;
coupling the light-triggered type semiconductor devices and the device cooling heat sinks into a single structure; and
burying and attaching, thereafter, the optical fiber in the groove formed in the housing, while inserting the optical fiber through an optical fiber insertion groove, the optical fiber insertion groove, which corresponds in position to the groove of the housing, being provided on a side surface of the device cooling heat sink, which contacts a groove-side surface of the housing of the light-triggered type semiconductor device.
5. A semiconductor apparatus and method of
assembling the same, substantially as hereinbefore
described with reference to the accompanying drawings,

Documents:

http://ipindiaonline.gov.in/patentsearch/GrantedSearch/viewdoc.aspx?id=Vr9BXnhYek6AQmsOSC+QRg==&loc=+mN2fYxnTC4l0fUd8W4CAA==


Patent Number 279628
Indian Patent Application Number 2481/DEL/2005
PG Journal Number 05/2017
Publication Date 03-Feb-2017
Grant Date 27-Jan-2017
Date of Filing 14-Sep-2005
Name of Patentee TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Applicant Address 13-16 MITA 3-CHOME, MINATO-KU, TOKYO 108-0073, JAPAN.
Inventors:
# Inventor's Name Inventor's Address
1 FUJIMOTO TAKAFUMI C/O TOSHIBA MITSUBISHI-ELETRIC INDUSTRIAL SYSTEMS CORPORATION, OF 13-16 MITA 3-CHOME, MINATO-KU, TOKYO 108-0073, JAPAN.
PCT International Classification Number H01L
PCT International Application Number N/A
PCT International Filing date
PCT Conventions:
# PCT Application Number Date of Convention Priority Country
1 2005-084255 2005-03-23 Japan