Title of Invention

MAGNET ARRANGEMENT FOR A PLANAR MAGNETRON

Abstract The invention relates to a magnetic arrangement for a planar magnetron, in which an initial magnetic pole encompasses a second magnetic pole. This magnetic arrangement is moved linear in longitudinal direction to a target by a specific value and then moved back in opposite direction by the same value. In one version, an additional perpendicular motion is effected. The magnet arrangement is designed so that north and south pole interlock and waviform racetracks are generated. This enables constant sputtering from the entire target surface.
Full Text

Documents:

485-MUM-2006-ABSTRACT(19-2-2009).pdf

485-mum-2006-abstract(29-3-2006).pdf

485-mum-2006-abstract(granted)-(11-6-2010).pdf

485-MUM-2006-CANCELLED PAGES(19-2-2009).pdf

485-MUM-2006-CLAIMS(19-2-2009).pdf

485-mum-2006-claims(29-3-2006).pdf

485-mum-2006-claims(granted)-(11-6-2010).pdf

485-MUM-2006-CORRESPONDENCE(12-1-2007).pdf

485-mum-2006-correspondence(14-11-2006).pdf

485-MUM-2006-CORRESPONDENCE(19-2-2009).pdf

485-mum-2006-correspondence(27-3-2006).pdf

485-mum-2006-correspondence(ipo)-(11-6-2010).pdf

485-mum-2006-correspondence(ipo)-(22-5-2008).pdf

485-MUM-2006-DESCRIPTION(COMPLETE)-(19-2-2009).pdf

485-mum-2006-description(complete)-(29-3-2006).pdf

485-mum-2006-description(granted)-(11-6-2010).pdf

485-MUM-2006-DRAWING(19-2-2009).pdf

485-mum-2006-drawing(29-3-2006).pdf

485-mum-2006-drawing(granted)-(11-6-2010).pdf

485-mum-2006-form 1(15-6-2006).pdf

485-MUM-2006-FORM 1(19-2-2009).pdf

485-mum-2006-form 1(29-3-2006).pdf

485-mum-2006-form 13(14-11-2006).pdf

485-mum-2006-form 18(12-5-2006).pdf

485-mum-2006-form 18(14-11-2006).pdf

485-mum-2006-form 2(19-2-2009).pdf

485-mum-2006-form 2(29-3-2006).pdf

485-mum-2006-form 2(granted)-(11-6-2010).pdf

485-MUM-2006-FORM 2(TITLE PAGE)-(19-2-2009).pdf

485-mum-2006-form 2(title page)-(29-3-2006).pdf

485-mum-2006-form 2(title page)-(granted)-(11-6-2010).pdf

485-mum-2006-form 26(12-1-2007).pdf

485-MUM-2006-FORM 26(19-2-2009).pdf

485-mum-2006-form 26(5-7-2006).pdf

485-mum-2006-form 3(14-11-2006).pdf

485-mum-2006-form 3(29-3-2006).pdf

485-mum-2006-form 5(14-11-2006).pdf

485-mum-2006-form 5(29-3-2006).pdf


Patent Number 240973
Indian Patent Application Number 485/MUM/2006
PG Journal Number 25/2010
Publication Date 18-Jun-2010
Grant Date 11-Jun-2010
Date of Filing 29-Mar-2006
Name of Patentee APPLIED MATERIALS GMBH & CO.KG
Applicant Address SIEMENSSTRASSE 100, D-63755 ALZENAU,
Inventors:
# Inventor's Name Inventor's Address
1 DEPPISCH THOMAS RHONSTRASSE 56 D-63743 ASCHAFFENBURG
2 LOPP ANDREAS HANAUER STRASSE 26 D-63579 FREIGERICHT
PCT International Classification Number H01F7/127
PCT International Application Number N/A
PCT International Filing date
PCT Conventions:
# PCT Application Number Date of Convention Priority Country
1 05007339.4 2005-04-05 EUROPEAN UNION