Title of Invention | MAGNET ARRANGEMENT FOR A PLANAR MAGNETRON |
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Abstract | The invention relates to a magnetic arrangement for a planar magnetron, in which an initial magnetic pole encompasses a second magnetic pole. This magnetic arrangement is moved linear in longitudinal direction to a target by a specific value and then moved back in opposite direction by the same value. In one version, an additional perpendicular motion is effected. The magnet arrangement is designed so that north and south pole interlock and waviform racetracks are generated. This enables constant sputtering from the entire target surface. |
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485-MUM-2006-ABSTRACT(19-2-2009).pdf
485-mum-2006-abstract(29-3-2006).pdf
485-mum-2006-abstract(granted)-(11-6-2010).pdf
485-MUM-2006-CANCELLED PAGES(19-2-2009).pdf
485-MUM-2006-CLAIMS(19-2-2009).pdf
485-mum-2006-claims(29-3-2006).pdf
485-mum-2006-claims(granted)-(11-6-2010).pdf
485-MUM-2006-CORRESPONDENCE(12-1-2007).pdf
485-mum-2006-correspondence(14-11-2006).pdf
485-MUM-2006-CORRESPONDENCE(19-2-2009).pdf
485-mum-2006-correspondence(27-3-2006).pdf
485-mum-2006-correspondence(ipo)-(11-6-2010).pdf
485-mum-2006-correspondence(ipo)-(22-5-2008).pdf
485-MUM-2006-DESCRIPTION(COMPLETE)-(19-2-2009).pdf
485-mum-2006-description(complete)-(29-3-2006).pdf
485-mum-2006-description(granted)-(11-6-2010).pdf
485-MUM-2006-DRAWING(19-2-2009).pdf
485-mum-2006-drawing(29-3-2006).pdf
485-mum-2006-drawing(granted)-(11-6-2010).pdf
485-mum-2006-form 1(15-6-2006).pdf
485-MUM-2006-FORM 1(19-2-2009).pdf
485-mum-2006-form 1(29-3-2006).pdf
485-mum-2006-form 13(14-11-2006).pdf
485-mum-2006-form 18(12-5-2006).pdf
485-mum-2006-form 18(14-11-2006).pdf
485-mum-2006-form 2(19-2-2009).pdf
485-mum-2006-form 2(29-3-2006).pdf
485-mum-2006-form 2(granted)-(11-6-2010).pdf
485-MUM-2006-FORM 2(TITLE PAGE)-(19-2-2009).pdf
485-mum-2006-form 2(title page)-(29-3-2006).pdf
485-mum-2006-form 2(title page)-(granted)-(11-6-2010).pdf
485-mum-2006-form 26(12-1-2007).pdf
485-MUM-2006-FORM 26(19-2-2009).pdf
485-mum-2006-form 26(5-7-2006).pdf
485-mum-2006-form 3(14-11-2006).pdf
485-mum-2006-form 3(29-3-2006).pdf
485-mum-2006-form 5(14-11-2006).pdf
485-mum-2006-form 5(29-3-2006).pdf
Patent Number | 240973 | |||||||||
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Indian Patent Application Number | 485/MUM/2006 | |||||||||
PG Journal Number | 25/2010 | |||||||||
Publication Date | 18-Jun-2010 | |||||||||
Grant Date | 11-Jun-2010 | |||||||||
Date of Filing | 29-Mar-2006 | |||||||||
Name of Patentee | APPLIED MATERIALS GMBH & CO.KG | |||||||||
Applicant Address | SIEMENSSTRASSE 100, D-63755 ALZENAU, | |||||||||
Inventors:
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PCT International Classification Number | H01F7/127 | |||||||||
PCT International Application Number | N/A | |||||||||
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PCT Conventions:
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