|Title of Invention||
CATHODE ARRANGEMENT FOR ATOMIZING A ROTATABLE TARGET PIPE
|Abstract||The invention relates to a cathode device for atomizing a target pipe (12) having a non-rotatable magnetic means (23) for generating a magnetic field to contain a plasma, in which the target pipe (12) is rotatable within a vacuum chamber right through the magnetic field, in which at least one load-bearing structure (1), a movable support shaft (6) for the target pipe (12) is arranged, within the target pipe (12), a fixing device for the magnetic means (23) is arranged and in which at least one detachable coupling arrangement for changing the target pipe (12) is arranged between the support shaft (6) and the target pipe (12). At least between the movable support shaft (6) and the target pipe (12), a separator (15,67) coaxial thereto and two detachable points of separation respectively are arranged, and in that the torsionally rigid and dimensionally stable connections between the supporting shaft (6) and the separator (15,67) on the one hand, and between the separator (15,67) and the target pipe (12) on the other hand are detachable and recoverable through the points of separation.|
|Full Text||The present disclosure relates to a cathode device for atomizing a target pipe
according to the features of the invention.
In the vacuum coating technique, rotating coating cathodes are being used more
frequently. This usually involves a pipe rotatable around the longitudinal axis,
having a magnetic system fixed in the interior. An advantage of this rotation
cathode compared with planar cathodes is a much better utilization of the target
material, and consequently, greater serviceable life.
This tubular cathode is essentially distinguished by two principles of
configuration. The explanation of the two principles follows in the examples of
horizontal coating equipment.
In the first principle, the complete drive unit, including the media supply on the
cover of the coating chamber in the form of so-called end blocks or end heads is
mounted on each of the pipe ends. For target rotation, the entire unit, including
the cover, is removed from the installation. Outside of the installation, the target
rotation is done on a special work rack or the entire unit is replaced.
In the secorfd principle, the drive unit including the media supply is mounted on a side chamber
wall. Slewing motions and media are consequently introduced from the side into the process
chamber. This may be a freely projecting (cantilevered) construction up to a certain pipe length.
An additional support on the other end of the pipe is required for longer pipes. For the target
rotation, the target pipe, including the magnetic system found in the interior, is dismounted from
the drive unit and lifted from the chamber. Afterwards, the entire target magnetic unit may either
be changed or further dismantled and only the actual target pipe replaced.
The main objective is always to conduct a target rotation in as short a time as possible, in order to
obtain the shortest possible system downtime of the installation.
There are other negative points in the projecting cathodes: there is great force at least on the rear
side of the junction point as a result of the design and operation. Furthermore, there must be a
precise rotary movement through constant axial orientation, since even smaller deviations in a
target length of four meters have enormous negative effects.
Prior art in this regard are mostly simple flange solutions that are connected on the outer diameter
using several screws. This may be a mechar ically stable connection, but its disadvantage is that
all screws need to be individually loosened for disassembly, requiring much space and an
enormous amount of time.
Furthermore, different ways for achieving the object are known, in which the connection is made
via a combination of union nuts having different geometries on the outer surface of the target.
Another difficulty in creating a connection that should also be mentioned is that there are two
different principles of target pipes.
The first principle" deals with targets man jfactured from a mechanically stable, vacuum-tight and
workable thick-walled pipe. In this case, there are no strict limits for the design of the sealing and
As required by the process, the second principle deals with a thin-walled, but still vacuum-tight
and mechanically stable support pipe, on which in turn the actual target material, e.g.. Si, Zn,
SiAl and all other mechanically unstable materials, are placed in a different way.
One of the tasks was therefore to obtain a connection between the driving gear and the target
pipe, which on the one hand is independent of the design of the target pipe, but on the other hand
reliably correlates the target magnetic system unit mechanically and using vacuum technology,
and furthermore allows a rapid target rotation. At the same time, fast disassembly of the target
magnetic system unit should be possible. The target or support pipe should be easy to
manufacture at a reasonable price, since this involves an expendable part.
The prior art will be explained in greater detail in the following with the help of some
US 4 356 073 discloses an atomizing and coating device for even substrates having a cylindrical
cathode and a magnetic system accommodated parallel to the axis therein. The cathode is open on
one side and is provided there with a hancle, through which new or other surface parts may be
placed section by section by turning the c athode into the range of influence of the race track
magnetic field, be it to compensate for the wear or to change the coating material. The magnetic
system, the angular position of which can Lkewise be changed via a lever, is supported via fitted
pole pieces - non-slip - on the inner surface of the target pipe. Cooling water is supplied through
the tubular magnetic support
and flows out of the opening of the target pipe into the open air. The assembly and the
replacement of the target pipe, necessitated by wear and tear, is possible only through a circular
opening of a correspondingly larger cross section, by unscrewing a straining ring and a bearing
ring, in the course of which it may be diffici.lt to thread into its stationary bearing the centric
bearing neck, lying opposite, of the target pipe sealed there, without having to open the entire
Through US 4_417_968, a rotation-symmetrical cathode system for magnetron coating of rotating
bulk goods in a cylindrical chamber is knowr, in which a stationary target pipe and a rotatable
multipolar magnetic system therein are con:entrically arranged. Numerous other magnetron
cathodes that are parallel to the axis are arraiged with reverse building principle in radial and
tangential equidistant distances, i.e., stationary magnetic systems oriented toward the center are
arranged within the target pipes rotatable through driving gears. Numerous rod-shaped substrate
holders, which are synchronously driven through a planetary gear, are arranged in the more or
less ring-shaped space between the central target pipe and the peripheral target pipes. Because of
their double-ended orientations, changing all the target pipes requires that the ring-shaped
chamber cover having the substrate holders te dismounted, and the assembly and changing the
target pipes as well turn out to be difficult and time-consuming because of the depth of the
chambers and the need to loosen several screwed connections on the other end of the chamber.
Even the cooling systems are to be loosened a id opened and then closed again in the process.
Through US 4 422 916^ which is a continuation-in-part of US 4 356 073, a continuously working
cathode atomizing system for coating even substrates is known starting from Figure 9. A rotatable
target pipe and a magnetic system stored theiein in a stationary manner is arranged on the cover
of a more or less cuboid-shaped vacuum cha nber. Two sleeve shafts of a fixed chamber having
the magnetic system are held over pillow blocks with cooling connections. The rotatable target
which is driven via a chain by a concentric toothed wheel, an eccentric pinion gear having a shaft
parallel to the axis, and an external electromotor arranged on the chamber, is stored on the said
sleeve shafts in a rotatable manner by mear.s of two end walls and bearing bushes arranged
therein. Even in this case, an assembly and a change of the target pipe prove to be time-
consuming and difficult because for this purpose, the magnetic system also has to be dismantled
after taking a chamber cover apart.
Through US 5 437 778 ajod US 5 529 674, tubular, non-rotatable targets are known, through
which the substrates may be led through either axially or through slits through the axis.
Furthermore, variations are described, in wh ch ribbon-shaped substrates are led away outside
through the slits. Furthermore, planar targets vvith longitudinal boreholes and slits parallel to the
axis are described, through which the ribbon shaped substrate may be led away. The targets as
well as their supporting members are shown as non-rotatable because a turning through radial
joining elements for external connections would be prevented. Collet chucks are disclosed for
connecting the supporting members and the targets - insofar as symmetrical in rotation -- the
collet chucks being made of pivoting ring halves having inner conical surfaces and a joint and a
straining screw each, whose axis runs perpendicular to the tubular axle. Insofar as magnetic
systems are disclosed for the containment of plasma (Figures 9 and 20), these are found outside
of the target pipe. The invention does not deal with such systems.
Through WO 00/00766, it is known that a ridial ring flange is to be arranged at the end of a
tubular support shaft for a replaceable tubu ar target or a target-pipe combination, the radial
flange having a step and two lining grooves, cnto which the end of the target may be inserted in a
water and vacuum tight manner. Here, the ling flange of the support shaft and a further ring
flange at the end of the target pipe are connected through a detachable coupling arrangement
made up of two semicircular ring halves tha. may be braced against the ring flange through at
least one screw, whose axis is right-angled to he rotational axis.
Here, the ring halves each have at least one conical surface, which is designed to complement one
conical surface on the ring flange of the support shaft. Such a coupling arrangement, however,
requires considerable free space for positioning tools and for swiveling or removing the ring
halves themselves, and considerable tangentia sliding movements that consume force and cause
wear and tear occur while twisting the ring halves.
Through US 5 02S-563-,-'it is known to connect the two ends of a tubular target with two support
shafts, each of which exhibits a ring flange on their target side ends. Nothing is said about the
type of connection or their detachability. Arranged in the interior of the vacuum chamber for
storing the support shafts are pillow blocks - each insulated - of which one is designed to relay
current and the other to feed and carry off cooling water. The vacuum and watertight storing
requires a complex system of rotary seals, however, the separation of which makes changing the
target more difficult.
Through US 5 591 314 and the corresponding WO 97/15697, it,is furthermore known to provide
the end of a support shaft for a tubular taiget with a ring flange, whose side turned toward the
target exhibits a step having a radial ring surface and a lining groove having a ring seal. The step,
however, is only for plane parallel adjust ng of support shaft and target and not for centering.
Rather, the attempt to center is done through a straining ring and a screw thread connection found
on the inside of the straining ring and the outside of the target end. The screw thread connection
should preferably occur through two sciew-like coiled sections of a steel wire. Even such a
coupling arrangement requires considerable room to maneuver to position the tools and to remove
the straining ring itself, and considerable tangential sliding movements that consume force and, it
should be pointed out in particular, cause wear and tear while twisting the ring halves.
Through US 6 375 815 Bl, it is known to provide support shafts of rotatable
tubular targets, each having a ring flange and to make the connection with the
targets in turn through semi-annular coupling elements, which overlap undercut
ring flanges of the targets and rings on the support shafts, and likewise by
means of undercut screw thread connections that simultaneously bring about an
axial and a radial twisting. Such screw thread connections are made only at great
processing cost. Such a coupling arrangement, however, requires considerable
room to maneuver to position the tools and to swivel or remove the ring halves
themselves, and considerable tangential sliding movements that consume force
and cause wear and tear occur while twisting the ring halves.
On the other hand, the task of the present invention is to improve a cathode
arrangement of the species described at the start, to the effect that at the same
time a high and highly loadable coaxiality of support shaft (s) and target pipes, a
reliable seal against water and vacuum, and an easy, often recursive connection
and separation of support shaft (s) and target pipes without the need for much
room to maneuver and for much time for the necessary manipulations may be
brought about. Furthermore, an extremely good concentricity at a constant axial
position should be ensured.
The solution to the task presented follows in accordance with the features of the
This achieves a high coaxiality, capable of bearing a high load, of support shaft
(s) and target pipes, a reliable seal against water and vacuum, and an easy,
often recursive connection and separation of support shaft(s) and target pipes
without the need for much room to maneuver and period of time for the
necessary manipulations may be brought about. Furthermore, an extremely good
concentricity at a constant axial position of all rotating parts is ensured.
Exemplary embodiments of the subject matter of the invention and their function
and additional advantages will be explained in greater detail in the following,
with the help of the accompanying Figures 1 to 6.
Figure 1 An axial section through a stationary load-bearing structure for a
support shaft, a detachable coupling arrangement and the coupling side end of
the rotatable target pipe and of the magnetic system accommodated therein.
Figure 2 The arrangement according to Figure 1 in partially uncoupled state,
Figure 3 A section from the right part of Figure 2, in an enlarged scale,
Figure 4 An axial section through the parts of the driving gear essential for
Figure 5 A radial section along Line V-V in Figure 3,
Figure 6 A perspective representation of a bayonet connection, as they can
be used for the connection of a ring fiange and a straining ring,
Figure 7 A perspective explosive representation of a separated coupling
arrangement between a movable support shaft and a target pipe, and
Figure 8 A perspective representation of the coupling arrangement
according to Figure 7 in closed or coupled state.
Shown to the left in Figure 1 is a load-bearing structure 1, made up of a perpendicular plate 2 and
a firmly inserted support pipe 3. A vacuum rotary feedthrough 4 is tightly sealed here, on whose
right end is a radially braceable extension 5. Inserted into this vacuum rotary feedthrough 4 is a
rotatable support shaft 6, on whose right end a ring flange 8 is put on in such a way as to restrict
movement via a wedge 7, the ring flange being established in axial direction through a supporting
ring 9 via a screw thread connection 10. Between the outer circumference of support ring 9 and
ring flange 8 is a coaxial nozzle clearance area parallel to the axis, which forms a first positive-
locking element 11.
The system axis A-A, whose spatial position rray be chosen, is indicated by a broken line. Load-
bearing structure 1 may be fastened in the inter or of a vacuum chamber, not shown, on one of the
side walls, on the floor or on the ceiling of the vacuum chamber.
Shown on the right of a rotatable target pipe 12, which is made up of a support pipe 13 and a
coating 14 out of a coating material, which may be condensed in a non-reactive atmosphere (e.g.,
argon) on a substrate, not shown, or in a reactive atmosphere as a connection of coating 14. Here,
the substrate is moved through a guide parallel to axis A-A and vertical to the plane of projection.
These processes are known, however, and will not be described further. For example, support
pipe 13 and coating 14 may be made of the same material if this has a sufficient consistency.
The torque-resistant connection between support shaft 6 and target pipe 12 takes place through
the following means: between ring flange 8 and target pipe 12 is a strong bordering separator 15
having a ring flange 15a and a coaxial ring extension 15b, which locks into first positive-locking
element 11. For easier threading and for centering, ring extension 15b is provided inside and
outside with truncated cone surfaces 15c anc. 15d (Figure 2). A first one-piece straining ring 16
having at least one second detachable positive-locking element 17 overlaps ring flange 15a. The
connection may be concentrically tightened through bezels, such as a bayonet system (according
to Figure 6) or a thread.
In the further course, of separator 15, this has a hollow cylindrical extension 15e having two outer
threads 15f and 15g. A second one-piece straining ring 18 and a thrust bearing 19 is screwed onto
this extension. Straining ring 16 presses on a ring surface 15h of separator 15.
In the interior of support shaft 6, of separator 15 and of target pipe 12 is found - concentrically or
parallel to axis A-A - a load-bearing system of pipes 20, 21 and 22, which forms a support for a
known, rigid magnetic system 23, made up of yokes 24 and magnets 25. The suspension and
determination of position take place through support elements 26, of which only one is shown.
The vacuum tight cooling means supply is shown by a thick arrow. Particulars and effects are
explained in greater detail with the help of Figure 3.
Figure 2 shows - maintaining the previous reference figures - the arrangement according to
Figure 1 in partially decoupled state. In addition, the following is specified:
Almost the entire sector of separator 15 is surrounded by a rotation-symmetrical and coaxial
darkroom screen 27, which is made up of a connection ring 26 and hollow cylinders 29, 30 and
31, in which hollow cylinder 31 slightly overlaps the end of target pipe 12.
In Figure 2, support shaft 6 having ring flange 8 is decoupled on a first point of separation 32,
after the straining ring 16 has been loosened fro n ring flange 8. The end of pipe 20 turned toward
first point of separation 32 is coaxially stored in support shaft 6 through a straining ring made of
plastic with boreholes 33 for coolant penetration. Ring flange 15a is extracted from positive-
locking element 11, likewise pipe 21 from plug-type connector 34 having pipe 20. Darkroom
screen 27 may be coaxially pushed toward target pipe 12 and also dismantled so that tools may be
put on straining rings 16 and 18. The complex structural component to the right of point of
separation 32 may now be removed from the vacuum chamber.
It is emphasized that this complex structural component for relatively short target pipes 12 may
be stored in a floating manner, or that for relat vely long target pipes 12 an additional storing may
be placed on its opposite, right end, which is not shown here, however. The border lies between
approximately 100 and 200 cm.
Figure 3 shows - while maintaining the previous reference figures - an enlarged view of the
arrangement according to Figure 2 to the right of the radial surface plane E-E in Figure 2 - but in
a running state. Straining ring 18 has interchanging boreholes 18a and 18b on the circumference.
Rod-shaped lathe tools may be inserted into boreholes 18a. Mushroom-shaped support bodies 48
having dome-shaped outer surfaces 48a on which hollow cylinder 30 of darkroom screen 27 is
propped up, are put into boreholes 18b.
A second point of separation 53 is found between straining ring 18 and ring-shaped abutment 19
screwed on stay pipe 13 in such a way that it restricts movement and is sealed. Points of
separation 32 and 53 are to be considered completely independent of one another. They may be
created within the scope of Claim 1 compleiely independent of one another and, within the scope
of the exemplary embodiment, do not have c.ny compelling combinatorial character.
Figure 3 shows within point of separation 53 an axially movable
thrust collar 35, which has a concentric truncated cone surface 35a. An expander 36 is arranged
thereon, sector-pattern sleeves 36a having outei surfaces 36b, which by twisting straining ring 18
are retractable in radial directions into an inner ring-shaped recess 13a of stay pipe 13 in order to
lay down stay pipe 13 in axial and radial direciion. In the course of screwing back straining ring
18, sleeves 36a are radially drawn together throjgh annular spring 37 to release target pipe 12.
Arranged between sleeves 36 and thrust bearing 19 is a further thrust collar 38, which together
with thrust bearing 19 includes V-shaped snap -ing groove 39 that opens outwards, in which there
is an elastomer sealing ring 40. In the course of twisting the device, sealing ring 40 is pressed
against a cylindrical inner surface of stay pipe 19 in order to seal coolant-filled space 41 within
stay pipe 13 and target pipe 12 against the vacium in the vacuum chamber.
For purposes of compensating the assembly state according to Figure 3, straining ring 18 is
screwed back to the left. As a result, thrust collar 35 becomes axially freely movable. Annular
spring 37 tightens, as a result of which sleeves 36a slide on truncated cone surface 35a and its
outer surfaces 36b release stay pipe 13 with coating 14 from atomizing material. Thrust collar 38
follows the movement under the influence of a wave-shaped annular spring 38a until a limiting
ring 49 made up of a spring steel wire open on one side, as a result of which snap ring groove 39
widens and sealing ring 40 can tighten and likewise loosen from stay pipe 13. Target pipe 12 may
now be pulled off in axial direction toward the right. The restoration of the operating state
according to Figures 1 and 3 follows in the re\ erse.
Load-bearing structure 1 is shown freely in space in Figure 4 - while continuing the reference
figures. Support shaft 6 is rotatably stored over roller bearing 5 in stay pipe 3. Support shaft 6 has
extension 6a, on which via roller bearing 43 a rotation coupling 42 is stored in a stationary
manner for coolant supply and carrying off.
Such types of rotation couplings 42 for liquids are known in themselves, however, so that a
description of other particulars may be dispensed with. The actuation of support shaft 6 takes
place via motor 44, two pulleys 45 and 46, and a transmission belt 47. Sliding contacts 50 are
provided for the supply of atomizing voltage. Connecting channels 51 and 52 are provided for the
supply and carrying off of coolants.
Figure 5 shows a radial section along line V-V in Figure 3. Arranged on the circumference of
straining ring 18, at equidistant distribution anc radial directions, are boreholes 18a for inserting a
rod-shaped tool and 18b for putting in support bodies 48, which are mushroom-shaped and
provided with dome-shaped outer surfaces 48 i, on which darkroom screen 27 that turns along
with it is propped up.
Figure 6 shows a perspective representation of a bayonet connection, as it may be used for
connecting a ring flange 8 and straining ring It. Ring flange 8 is fastened in a twist-proof manner
at the end of support shaft 6; three pin rockers 3a are arranged on its circumference at equidistant
distribution. Found in analogous arrangement in straining ring 16 are three L-shaped columns 16a
having intakes and flanks 16b parallel to the axis, which run in a selectively ascending manner to
the right toward their ends 16c in axial direc.ion, so that the bayonet connection tightens and
loosens again sensitively and without much effort while putting together and twisting. The
threaded joint may be made non-detachable without tools using lock screws, not shown here.
Shown on the left of Figure 7 is the chamber inner end of such a support shaft 6, on which a first
point of separation 60 is arranged on the left and on the right, beside it, a second point of
separation 61. The first point of separation 60 i; formed through a ring flange 62 having a hub 63,
which is halved on a portion of its length, and at this point, is supplemented by a semi-ring-
shaped thrust piece 64. which is shown only patially here. The connection
takes place by pushing in in the direction of the arrow and by twisting by means of screws and
screw holes 65 and 66. This twisting, which - symmetrical in rotation ~ is then torque- and flex-
resistant, forms a separator 67 together with rinj; flange 62 (Figure 8).
The second point of separation 61 is made up af two combinable parts that are positive-locking
with one another, namely ring flange 62 and straining ring 68. The connection initially takes
place by pushing a target pipe 12 to the left, which at least on one end has a ring flange 69 that
sticks out radially outwards. Target pipe 12 m<:y be monolithically constructed for mechanically> highly stable atomizing materials, but in less durable non-metallic materials, may also made of a
metallic inner pipe and an outer coating made of atomizing materials, such as for example, Si, Zn,
The fixing of ring flange 69, and consequently, of target pipe 12, follows in a positive-locking
and non-positive manner through straining ring 68, which is part of a bayonet connection and
through which ring flange 69 and ring flange 62 is non-rigid to the left and is also twistable
compared with ring flange 62. To produce the positive-locking, ring flange 62 has on its outer
circumference at least one latch 70, which after the twisting of straining ring 68 is each
overlapped by a hook ring sector 71. Flanks 7 Da of latch(es) 70 that overlap in the process and
inner surface(s) 71a of ring sectors 71 may include in the process in axial direction an angle of
pressure with a slight slope (as for a screw thread). Straining ring 68 has a step-by-step
To fix the twisting angle, straining ring 68 has a fork part 72 having a tangential slit 73. On the
other hand, ring flange 62 has a radial overhang 74 having a screw hole 75, into which a draw
spindle 76 is screwed in. Between overhang 74 and the head of draw spindle 78 is a ring 77, from
which a retention pin 78 sticks out radially to the screw axis but tangentially to ring flange 62, the
retention pin engaging in a pushed together state, in accordance with Figure 8, into slit 73.
Figure 8 shows a perspective representation of the coupling arrangement according to Figure 7 in
closed or coupled state. It can be seen that lub 63 and thrust piece 64 screws down almost
together and with support shaft 6, completing £ rotational solid, which together with ring flange 6
forms a unit, which is indeed detachable.
Ring flange 69 of target pipe 12 is arranged between ring flange 62 and straining ring 68.
However, it is now visible that latch 70 juts slightly behind ring sector 71 and in this manner
forms a positive-locking connection. This also applies to any other connections of this type. Ring
flange 69 of target pipe 12 lies in recess 68a o" straining ring 68. Straining screw 76 is tightened,
and retention pin 78 now lies within slit 73.
In the interior of rotatable target pipe 12 is fojnd - as in Figures 1 to 4 as well - a non-rotating
magnetic system, not shown here, under whose, lines of electric flux target pipe 12 runs through in
operation. Supports and lines for the magnetic system and its coolant run through support shaft 6
until target pipe 12, but are likewise not showr here.
1. A cathode device for atomizing a target pipe (12) having a non-rotatable
magnetic means (23) for generating a magnetic field to contain a plasma,
in which the target pipe (12) is rotatable within a vacuum chamber right
through the magnetic field, in which at least one load-bearing structure
(1), a movable support shaft (6) for the target pipe (12) is arranged,
within the target pipe (12), a fixing device for the magnetic means (23) is
arranged and in which at least one detachable coupling arrangement for
changing the target pipe (12) is arranged between the support shaft (6)
and the target pipe (12),
characterized in that
at least between the movable support shaft (6) and the target pipe (12), a
separator (15,67) coaxial thereto and two detachable points of separation
respectively are arranged, and in that the torsionally rigid and dimensionally
stable connections between the supporting shaft (6) and the separator
(15,67) on the one hand, and between the separator (15,67) and the target
pipe (12) on the other hand are detachable and recoverable through the
points of separation.
2. The cathode device as claimed in claim 1, wherein the first point of
separation (32) is arranged between a ring flange (6) on the support shaft
(6) and the separator (15), and wherein the second point of separation
(53) is arranged between the separator (15) and the interior of the target
3. The cathode device as claimed in claim 1, wherein
a) the support shaft (6) within the vacuum chamber is provided with a
ring flange (8) having a first positive-locking element (11),
b) between the ring flange (8) and the target pipe (12), the separator
(15) is surrounded by a first one-piece straining ring (16) having a
second positive-locking element (17), through which the separator
(15) is twistable coaxially and torque-resistant against the ring
flange (8) of the support shaft (6).
4. The cathode device as claimed in claim 1, wherein the separator (15) is
surrounded by a second one-piece straining ring (18), which in the
opposite direction to the first straining ring (8) can be placed on radially
movable sleeves (36a) of an expander (36) for operation, through which
the appropriate end of the target pipe (12) is twistable coaxially and
torque-resistant with the separator (15).
5. The cathode device as claimed in claim 1, wherein the first positive-
locking element (11) is designed as a coaxial annular gap in the ring
flange (8) and the second positive-locking element (17) is designed on the
outer circumference of the ring flange (8).
6. The cathode device as claimed in claim 1, wherein the ring flange (8) of
the support shaft (6) exhibits a coaxial recess for the axial and radial
positive-locking insertion of a coaxial and ring-shaped ring extension (15b)
on the end of the separator (15) far from the target.
7. The cathode device as claimed in claim 6, wherein the separator (15) has
a ring flange (15a) that projects outwards, on which the ring extension
(15b) is arranged.
8. The cathode device as claimed in claim 7, wherein the separator (15) on
which the side turned away from the ring flange (15b) exhibits a ring-
shaped stop face (15h) for the first straining ring (16).
9. The cathode device as claimed in claim 1, wherein the separator (15) has
on its side turned toward the target pipe (12) an external thread (15f) for
the second straining ring (18), through which a radial expander (36) is
twistable against an inner surface of the target pipe (12).
10. The cathode device as claimed in claim 9, wherein the radial expander
(36) exhibits at least three; sector-pattern sleeves (36a) with inner
truncated cone surfaces.
11. The cathode device as claimed in claim 9, wherein the sectors of the
sleeves (36a) are held in a contractible manner through an outer annular
12. The cathode device as claimed in at least one of claims 8 to 10, wherein a
thrust collar (35) is arranged between the second straining ring (18) and
the expander (36), the thrust collar having an outer truncated cone
surface (35a) that is at least complementary to a large extent to the
truncated cone surfaces of the sleeves (36a).
13. The cathode device as claimed in claim 1, wherein the first straining ring
(8) exhibits a ring-shaped recess as a positive-locking element (11) for the
ring flange (15a) of the separator (15) for connecting the separator (15)
with the support shaft (6) on the side turned toward the target pipe (12).
14. The cathode device as claimed in at least one of claims 1 to 4, wherein
the two straining rings (16,18) are surrounded by a darkroom screen (27).
15.The cathode as claimed in one of claims 1 to 4, wherein a first pipe (20) is
arranged in the interior of support shaft (6), a second pipe (21) in the
interior of the separator (15), and a third pipe (22) in the interior of the
target pipe (12) for holding the magnetic system (23), in which the two
pipes (20,21) are connected to one another through an axially detachable,
but torque-resistant plug-type connection (34).
16. The cathode device as claimed in one of Claims 1 to 4, wherein at least
the straining ring (18) is provided on its circumference with boreholes
(18a) for inserting a tool.
17. The cathode device as claimed in claim 4, wherein the straining ring (18)
is provided on its circumference with boreholes (18b), into which the
support bodies (48) are put n for the stationary support of the darkroom
screen (27) on the rotatable straining ring (18).
18. The cathode device as claimed in claim 1, wherein
a) a first driven pipe is designed as a support shaft (6), which ends in
the vacuum chamber, and which on this end supports a coaxial
separator (67), made up of a ring flange (62), a hub (63) and a
thrust piece (64),
b) the hub (63) has a semi-annular recess for the thrust piece (64)
complementary thereto, and this thrust piece (64) may be twisted
in a non-positive and torque-resistant manner against the support
c) the hub (63) is connected to a ring flange (62), which on its
circumference supports at least one latch (70) for catching into a
ring sector (71) of an axially following straining ring (68),
d) the straining ring (68) having on its circumference at least one ring
sector (71) for the positive-locking overlap over the latch (70), and
e) the target pipe (12) has a ring flange (69) that sticks out radially
outwards, which in connecting the ring flange (62) and straining
ring (68) between these can be clamped so that the target pipe
(12) can turn along.
19. The cathode device as claimed in claim 18, wherein the straining ring (68)
encompassing the target pipe (12) has on its circumference at least one
fork part (72) having a tangentially orientated slit (73), into which a
retention pin (18) rotatably fastened on the ring flange (62) may be
20. The cathode device as claimed in claim 19, wherein the ring flange (62)
has on its circumference at least one overhang (74) having a screw hole
(75), into which a straining screw (76) may be screwed in while
interconnecting a ring (77) and the retention pin (78) runs radially to the
straining screw (76), but tangentially to the circumference of the ring
The invention relates to a cathode device for atomizing a target pipe (12) having
a non-rotatable magnetic means (23) for generating a magnetic field to contain a
plasma, in which the target pipe (12) is rotatable within a vacuum chamber right
through the magnetic field, in which at least one load-bearing structure (1), a
movable support shaft (6) for the target pipe (12) is arranged, within the target
pipe (12), a fixing device for the magnetic means (23) is arranged and in which
at least one detachable coupling arrangement for changing the target pipe (12)
is arranged between the support shaft (6) and the target pipe (12). At least
between the movable support shaft (6) and the target pipe (12), a separator
(15,67) coaxial thereto and two detachable points of separation respectively are
arranged, and in that the torsionally rigid and dimensionally stable connections
between the supporting shaft (6) and the separator (15,67) on the one hand,
and between the separator (15,67) and the target pipe (12) on the other hand
are detachable and recoverable through the points of separation.
|Indian Patent Application Number||687/KOL/2005|
|PG Journal Number||02/2010|
|Date of Filing||29-Jul-2005|
|Name of Patentee||APPLIED MATERIALS, INC.|
|Applicant Address||DELAWARE, 3050 BOWERS AVENE, SANTA CLARA, CALIFORNIA 95054|
|PCT International Classification Number||C29C 15/00|
|PCT International Application Number||N/A|
|PCT International Filing date|