Title of Invention

CATHODE ARRANGEMENT FOR ATOMIZING A ROTATABLE TARGET PIPE

Abstract

The invention relates to a cathode device for atomizing a target pipe (12) having a non-rotatable magnetic means (23) for generating a magnetic field to contain a plasma, in which the target pipe (12) is rotatable within a vacuum chamber right through the magnetic field, in which at least one load-bearing structure (1), a movable support shaft (6) for the target pipe (12) is arranged, within the target pipe (12), a fixing device for the magnetic means (23) is arranged and in which at least one detachable coupling arrangement for changing the target pipe (12) is arranged between the support shaft (6) and the target pipe (12). At least between the movable support shaft (6) and the target pipe (12), a separator (15,67) coaxial thereto and two detachable points of separation respectively are arranged, and in that the torsionally rigid and dimensionally stable connections between the supporting shaft (6) and the separator (15,67) on the one hand, and between the separator (15,67) and the target pipe (12) on the other hand are detachable and recoverable through the points of separation.

Full Text

The present disclosure relates to a cathode device for atomizing a target pipe according to the features of the invention. In the vacuum coating technique, rotating coating cathodes are being used more frequently. This usually involves a pipe rotatable around the longitudinal axis, having a magnetic system fixed in the interior. An advantage of this rotation cathode compared with planar cathodes is a much better utilization of the target material, and consequently, greater serviceable life. This tubular cathode is essentially distinguished by two principles of configuration. The explanation of the two principles follows in the examples of horizontal coating equipment. In the first principle, the complete drive unit, including the media supply on the cover of the coating chamber in the form of so-called end blocks or end heads is mounted on each of the pipe ends. For target rotation, the entire unit, including the cover, is removed from the installation. Outside of the installation, the target rotation is done on a special work rack or the entire unit is replaced. In the secorfd principle, the drive unit including the media supply is mounted on a side chamber wall. Slewing motions and media are consequently introduced from the side into the process chamber. This may be a freely projecting (cantilevered) construction up to a certain pipe length. An additional support on the other end of the pipe is required for longer pipes. For the target rotation, the target pipe, including the magnetic system found in the interior, is dismounted from the drive unit and lifted from the chamber. Afterwards, the entire target magnetic unit may either be changed or further dismantled and only the actual target pipe replaced. The main objective is always to conduct a target rotation in as short a time as possible, in order to obtain the shortest possible system downtime of the installation. There are other negative points in the projecting cathodes: there is great force at least on the rear side of the junction point as a result of the design and operation. Furthermore, there must be a precise rotary movement through constant axial orientation, since even smaller deviations in a target length of four meters have enormous negative effects. Prior art in this regard are mostly simple flange solutions that are connected on the outer diameter using several screws. This may be a mechar ically stable connection, but its disadvantage is that all screws need to be individually loosened for disassembly, requiring much space and an enormous amount of time. Furthermore, different ways for achieving the object are known, in which the connection is made via a combination of union nuts having different geometries on the outer surface of the target. Another difficulty in creating a connection that should also be mentioned is that there are two different principles of target pipes. The first principle" deals with targets man jfactured from a mechanically stable, vacuum-tight and workable thick-walled pipe. In this case, there are no strict limits for the design of the sealing and fastening geometries. As required by the process, the second principle deals with a thin-walled, but still vacuum-tight and mechanically stable support pipe, on which in turn the actual target material, e.g.. Si, Zn, SiAl and all other mechanically unstable materials, are placed in a different way. One of the tasks was therefore to obtain a connection between the driving gear and the target pipe, which on the one hand is independent of the design of the target pipe, but on the other hand reliably correlates the target magnetic system unit mechanically and using vacuum technology, and furthermore allows a rapid target rotation. At the same time, fast disassembly of the target magnetic system unit should be possible. The target or support pipe should be easy to manufacture at a reasonable price, since this involves an expendable part. The prior art will be explained in greater detail in the following with the help of some publications. US 4 356 073 discloses an atomizing and coating device for even substrates having a cylindrical cathode and a magnetic system accommodated parallel to the axis therein. The cathode is open on one side and is provided there with a hancle, through which new or other surface parts may be placed section by section by turning the c athode into the range of influence of the race track magnetic field, be it to compensate for the wear or to change the coating material. The magnetic system, the angular position of which can Lkewise be changed via a lever, is supported via fitted pole pieces - non-slip - on the inner surface of the target pipe. Cooling water is supplied through the tubular magnetic support and flows out of the opening of the target pipe into the open air. The assembly and the replacement of the target pipe, necessitated by wear and tear, is possible only through a circular opening of a correspondingly larger cross section, by unscrewing a straining ring and a bearing ring, in the course of which it may be diffici.lt to thread into its stationary bearing the centric bearing neck, lying opposite, of the target pipe sealed there, without having to open the entire installation. Through US 4_417_968, a rotation-symmetrical cathode system for magnetron coating of rotating bulk goods in a cylindrical chamber is knowr, in which a stationary target pipe and a rotatable multipolar magnetic system therein are con:entrically arranged. Numerous other magnetron cathodes that are parallel to the axis are arraiged with reverse building principle in radial and tangential equidistant distances, i.e., stationary magnetic systems oriented toward the center are arranged within the target pipes rotatable through driving gears. Numerous rod-shaped substrate holders, which are synchronously driven through a planetary gear, are arranged in the more or less ring-shaped space between the central target pipe and the peripheral target pipes. Because of their double-ended orientations, changing all the target pipes requires that the ring-shaped chamber cover having the substrate holders te dismounted, and the assembly and changing the target pipes as well turn out to be difficult and time-consuming because of the depth of the chambers and the need to loosen several screwed connections on the other end of the chamber. Even the cooling systems are to be loosened a id opened and then closed again in the process. Through US 4 422 916^ which is a continuation-in-part of US 4 356 073, a continuously working cathode atomizing system for coating even substrates is known starting from Figure 9. A rotatable target pipe and a magnetic system stored theiein in a stationary manner is arranged on the cover of a more or less cuboid-shaped vacuum cha nber. Two sleeve shafts of a fixed chamber having the magnetic system are held over pillow blocks with cooling connections. The rotatable target pipe, which is driven via a chain by a concentric toothed wheel, an eccentric pinion gear having a shaft parallel to the axis, and an external electromotor arranged on the chamber, is stored on the said sleeve shafts in a rotatable manner by mear.s of two end walls and bearing bushes arranged therein. Even in this case, an assembly and a change of the target pipe prove to be time- consuming and difficult because for this purpose, the magnetic system also has to be dismantled after taking a chamber cover apart. Through US 5 437 778 ajod US 5 529 674, tubular, non-rotatable targets are known, through which the substrates may be led through either axially or through slits through the axis. Furthermore, variations are described, in wh ch ribbon-shaped substrates are led away outside through the slits. Furthermore, planar targets vvith longitudinal boreholes and slits parallel to the axis are described, through which the ribbon shaped substrate may be led away. The targets as well as their supporting members are shown as non-rotatable because a turning through radial joining elements for external connections would be prevented. Collet chucks are disclosed for connecting the supporting members and the targets - insofar as symmetrical in rotation -- the collet chucks being made of pivoting ring halves having inner conical surfaces and a joint and a straining screw each, whose axis runs perpendicular to the tubular axle. Insofar as magnetic systems are disclosed for the containment of plasma (Figures 9 and 20), these are found outside of the target pipe. The invention does not deal with such systems. Through WO 00/00766, it is known that a ridial ring flange is to be arranged at the end of a tubular support shaft for a replaceable tubu ar target or a target-pipe combination, the radial flange having a step and two lining grooves, cnto which the end of the target may be inserted in a water and vacuum tight manner. Here, the ling flange of the support shaft and a further ring flange at the end of the target pipe are connected through a detachable coupling arrangement made up of two semicircular ring halves tha. may be braced against the ring flange through at least one screw, whose axis is right-angled to he rotational axis. Here, the ring halves each have at least one conical surface, which is designed to complement one conical surface on the ring flange of the support shaft. Such a coupling arrangement, however, requires considerable free space for positioning tools and for swiveling or removing the ring halves themselves, and considerable tangentia sliding movements that consume force and cause wear and tear occur while twisting the ring halves. Through US 5 02S-563-,-'it is known to connect the two ends of a tubular target with two support shafts, each of which exhibits a ring flange on their target side ends. Nothing is said about the type of connection or their detachability. Arranged in the interior of the vacuum chamber for storing the support shafts are pillow blocks - each insulated - of which one is designed to relay current and the other to feed and carry off cooling water. The vacuum and watertight storing requires a complex system of rotary seals, however, the separation of which makes changing the target more difficult. Through US 5 591 314 and the corresponding WO 97/15697, it,is furthermore known to provide the end of a support shaft for a tubular taiget with a ring flange, whose side turned toward the target exhibits a step having a radial ring surface and a lining groove having a ring seal. The step, however, is only for plane parallel adjust ng of support shaft and target and not for centering. Rather, the attempt to center is done through a straining ring and a screw thread connection found on the inside of the straining ring and the outside of the target end. The screw thread connection should preferably occur through two sciew-like coiled sections of a steel wire. Even such a coupling arrangement requires considerable room to maneuver to position the tools and to remove the straining ring itself, and considerable tangential sliding movements that consume force and, it should be pointed out in particular, cause wear and tear while twisting the ring halves. Through US 6 375 815 Bl, it is known to provide support shafts of rotatable tubular targets, each having a ring flange and to make the connection with the targets in turn through semi-annular coupling elements, which overlap undercut ring flanges of the targets and rings on the support shafts, and likewise by means of undercut screw thread connections that simultaneously bring about an axial and a radial twisting. Such screw thread connections are made only at great processing cost. Such a coupling arrangement, however, requires considerable room to maneuver to position the tools and to swivel or remove the ring halves themselves, and considerable tangential sliding movements that consume force and cause wear and tear occur while twisting the ring halves. On the other hand, the task of the present invention is to improve a cathode arrangement of the species described at the start, to the effect that at the same time a high and highly loadable coaxiality of support shaft (s) and target pipes, a reliable seal against water and vacuum, and an easy, often recursive connection and separation of support shaft (s) and target pipes without the need for much room to maneuver and for much time for the necessary manipulations may be brought about. Furthermore, an extremely good concentricity at a constant axial position should be ensured. The solution to the task presented follows in accordance with the features of the invention. This achieves a high coaxiality, capable of bearing a high load, of support shaft (s) and target pipes, a reliable seal against water and vacuum, and an easy, often recursive connection and separation of support shaft(s) and target pipes without the need for much room to maneuver and period of time for the necessary manipulations may be brought about. Furthermore, an extremely good concentricity at a constant axial position of all rotating parts is ensured. Exemplary embodiments of the subject matter of the invention and their function and additional advantages will be explained in greater detail in the following, with the help of the accompanying Figures 1 to 6. To illustrate: Figure 1 An axial section through a stationary load-bearing structure for a support shaft, a detachable coupling arrangement and the coupling side end of the rotatable target pipe and of the magnetic system accommodated therein. Figure 2 The arrangement according to Figure 1 in partially uncoupled state, Figure 3 A section from the right part of Figure 2, in an enlarged scale, Figure 4 An axial section through the parts of the driving gear essential for the function, Figure 5 A radial section along Line V-V in Figure 3, Figure 6 A perspective representation of a bayonet connection, as they can be used for the connection of a ring fiange and a straining ring, Figure 7 A perspective explosive representation of a separated coupling arrangement between a movable support shaft and a target pipe, and Figure 8 A perspective representation of the coupling arrangement according to Figure 7 in closed or coupled state. Shown to the left in Figure 1 is a load-bearing structure 1, made up of a perpendicular plate 2 and a firmly inserted support pipe 3. A vacuum rotary feedthrough 4 is tightly sealed here, on whose right end is a radially braceable extension 5. Inserted into this vacuum rotary feedthrough 4 is a rotatable support shaft 6, on whose right end a ring flange 8 is put on in such a way as to restrict movement via a wedge 7, the ring flange being established in axial direction through a supporting ring 9 via a screw thread connection 10. Between the outer circumference of support ring 9 and ring flange 8 is a coaxial nozzle clearance area parallel to the axis, which forms a first positive- locking element 11. The system axis A-A, whose spatial position rray be chosen, is indicated by a broken line. Load- bearing structure 1 may be fastened in the inter or of a vacuum chamber, not shown, on one of the side walls, on the floor or on the ceiling of the vacuum chamber. Shown on the right of a rotatable target pipe 12, which is made up of a support pipe 13 and a coating 14 out of a coating material, which may be condensed in a non-reactive atmosphere (e.g., argon) on a substrate, not shown, or in a reactive atmosphere as a connection of coating 14. Here, the substrate is moved through a guide parallel to axis A-A and vertical to the plane of projection. These processes are known, however, and will not be described further. For example, support pipe 13 and coating 14 may be made of the same material if this has a sufficient consistency. The torque-resistant connection between support shaft 6 and target pipe 12 takes place through the following means: between ring flange 8 and target pipe 12 is a strong bordering separator 15 having a ring flange 15a and a coaxial ring extension 15b, which locks into first positive-locking element 11. For easier threading and for centering, ring extension 15b is provided inside and outside with truncated cone surfaces 15c anc. 15d (Figure 2). A first one-piece straining ring 16 having at least one second detachable positive-locking element 17 overlaps ring flange 15a. The connection may be concentrically tightened through bezels, such as a bayonet system (according to Figure 6) or a thread. In the further course, of separator 15, this has a hollow cylindrical extension 15e having two outer threads 15f and 15g. A second one-piece straining ring 18 and a thrust bearing 19 is screwed onto this extension. Straining ring 16 presses on a ring surface 15h of separator 15. In the interior of support shaft 6, of separator 15 and of target pipe 12 is found - concentrically or parallel to axis A-A - a load-bearing system of pipes 20, 21 and 22, which forms a support for a known, rigid magnetic system 23, made up of yokes 24 and magnets 25. The suspension and determination of position take place through support elements 26, of which only one is shown. The vacuum tight cooling means supply is shown by a thick arrow. Particulars and effects are explained in greater detail with the help of Figure 3. Figure 2 shows - maintaining the previous reference figures - the arrangement according to Figure 1 in partially decoupled state. In addition, the following is specified: Almost the entire sector of separator 15 is surrounded by a rotation-symmetrical and coaxial darkroom screen 27, which is made up of a connection ring 26 and hollow cylinders 29, 30 and 31, in which hollow cylinder 31 slightly overlaps the end of target pipe 12. In Figure 2, support shaft 6 having ring flange 8 is decoupled on a first point of separation 32, after the straining ring 16 has been loosened fro n ring flange 8. The end of pipe 20 turned toward first point of separation 32 is coaxially stored in support shaft 6 through a straining ring made of plastic with boreholes 33 for coolant penetration. Ring flange 15a is extracted from positive- locking element 11, likewise pipe 21 from plug-type connector 34 having pipe 20. Darkroom screen 27 may be coaxially pushed toward target pipe 12 and also dismantled so that tools may be put on straining rings 16 and 18. The complex structural component to the right of point of separation 32 may now be removed from the vacuum chamber. It is emphasized that this complex structural component for relatively short target pipes 12 may be stored in a floating manner, or that for relat vely long target pipes 12 an additional storing may be placed on its opposite, right end, which is not shown here, however. The border lies between approximately 100 and 200 cm. Figure 3 shows - while maintaining the previous reference figures - an enlarged view of the arrangement according to Figure 2 to the right of the radial surface plane E-E in Figure 2 - but in a running state. Straining ring 18 has interchanging boreholes 18a and 18b on the circumference. Rod-shaped lathe tools may be inserted into boreholes 18a. Mushroom-shaped support bodies 48 having dome-shaped outer surfaces 48a on which hollow cylinder 30 of darkroom screen 27 is propped up, are put into boreholes 18b. A second point of separation 53 is found between straining ring 18 and ring-shaped abutment 19 screwed on stay pipe 13 in such a way that it restricts movement and is sealed. Points of separation 32 and 53 are to be considered completely independent of one another. They may be created within the scope of Claim 1 compleiely independent of one another and, within the scope of the exemplary embodiment, do not have c.ny compelling combinatorial character. Figure 3 shows within point of separation 53 an axially movable thrust collar 35, which has a concentric truncated cone surface 35a. An expander 36 is arranged thereon, sector-pattern sleeves 36a having outei surfaces 36b, which by twisting straining ring 18 are retractable in radial directions into an inner ring-shaped recess 13a of stay pipe 13 in order to lay down stay pipe 13 in axial and radial direciion. In the course of screwing back straining ring 18, sleeves 36a are radially drawn together throjgh annular spring 37 to release target pipe 12. Arranged between sleeves 36 and thrust bearing 19 is a further thrust collar 38, which together with thrust bearing 19 includes V-shaped snap -ing groove 39 that opens outwards, in which there is an elastomer sealing ring 40. In the course of twisting the device, sealing ring 40 is pressed against a cylindrical inner surface of stay pipe 19 in order to seal coolant-filled space 41 within stay pipe 13 and target pipe 12 against the vacium in the vacuum chamber. For purposes of compensating the assembly state according to Figure 3, straining ring 18 is screwed back to the left. As a result, thrust collar 35 becomes axially freely movable. Annular spring 37 tightens, as a result of which sleeves 36a slide on truncated cone surface 35a and its outer surfaces 36b release stay pipe 13 with coating 14 from atomizing material. Thrust collar 38 follows the movement under the influence of a wave-shaped annular spring 38a until a limiting ring 49 made up of a spring steel wire open on one side, as a result of which snap ring groove 39 widens and sealing ring 40 can tighten and likewise loosen from stay pipe 13. Target pipe 12 may now be pulled off in axial direction toward the right. The restoration of the operating state according to Figures 1 and 3 follows in the re\ erse. Load-bearing structure 1 is shown freely in space in Figure 4 - while continuing the reference figures. Support shaft 6 is rotatably stored over roller bearing 5 in stay pipe 3. Support shaft 6 has extension 6a, on which via roller bearing 43 a rotation coupling 42 is stored in a stationary manner for coolant supply and carrying off. Such types of rotation couplings 42 for liquids are known in themselves, however, so that a description of other particulars may be dispensed with. The actuation of support shaft 6 takes place via motor 44, two pulleys 45 and 46, and a transmission belt 47. Sliding contacts 50 are provided for the supply of atomizing voltage. Connecting channels 51 and 52 are provided for the supply and carrying off of coolants. Figure 5 shows a radial section along line V-V in Figure 3. Arranged on the circumference of straining ring 18, at equidistant distribution anc radial directions, are boreholes 18a for inserting a rod-shaped tool and 18b for putting in support bodies 48, which are mushroom-shaped and provided with dome-shaped outer surfaces 48 i, on which darkroom screen 27 that turns along with it is propped up. Figure 6 shows a perspective representation of a bayonet connection, as it may be used for connecting a ring flange 8 and straining ring It. Ring flange 8 is fastened in a twist-proof manner at the end of support shaft 6; three pin rockers 3a are arranged on its circumference at equidistant distribution. Found in analogous arrangement in straining ring 16 are three L-shaped columns 16a having intakes and flanks 16b parallel to the axis, which run in a selectively ascending manner to the right toward their ends 16c in axial direc.ion, so that the bayonet connection tightens and loosens again sensitively and without much effort while putting together and twisting. The threaded joint may be made non-detachable without tools using lock screws, not shown here. Shown on the left of Figure 7 is the chamber inner end of such a support shaft 6, on which a first point of separation 60 is arranged on the left and on the right, beside it, a second point of separation 61. The first point of separation 60 i; formed through a ring flange 62 having a hub 63, which is halved on a portion of its length, and at this point, is supplemented by a semi-ring- shaped thrust piece 64. which is shown only patially here. The connection takes place by pushing in in the direction of the arrow and by twisting by means of screws and screw holes 65 and 66. This twisting, which - symmetrical in rotation ~ is then torque- and flex- resistant, forms a separator 67 together with rinj; flange 62 (Figure 8). The second point of separation 61 is made up af two combinable parts that are positive-locking with one another, namely ring flange 62 and straining ring 68. The connection initially takes place by pushing a target pipe 12 to the left, which at least on one end has a ring flange 69 that sticks out radially outwards. Target pipe 12 m<:y be monolithically constructed for mechanically> highly stable atomizing materials, but in less durable non-metallic materials, may also made of a metallic inner pipe and an outer coating made of atomizing materials, such as for example, Si, Zn, SiAl, etc. The fixing of ring flange 69, and consequently, of target pipe 12, follows in a positive-locking and non-positive manner through straining ring 68, which is part of a bayonet connection and through which ring flange 69 and ring flange 62 is non-rigid to the left and is also twistable compared with ring flange 62. To produce the positive-locking, ring flange 62 has on its outer circumference at least one latch 70, which after the twisting of straining ring 68 is each overlapped by a hook ring sector 71. Flanks 7 Da of latch(es) 70 that overlap in the process and inner surface(s) 71a of ring sectors 71 may include in the process in axial direction an angle of pressure with a slight slope (as for a screw thread). Straining ring 68 has a step-by-step indentation 68a. To fix the twisting angle, straining ring 68 has a fork part 72 having a tangential slit 73. On the other hand, ring flange 62 has a radial overhang 74 having a screw hole 75, into which a draw spindle 76 is screwed in. Between overhang 74 and the head of draw spindle 78 is a ring 77, from which a retention pin 78 sticks out radially to the screw axis but tangentially to ring flange 62, the retention pin engaging in a pushed together state, in accordance with Figure 8, into slit 73. Figure 8 shows a perspective representation of the coupling arrangement according to Figure 7 in closed or coupled state. It can be seen that lub 63 and thrust piece 64 screws down almost together and with support shaft 6, completing £ rotational solid, which together with ring flange 6 forms a unit, which is indeed detachable. Ring flange 69 of target pipe 12 is arranged between ring flange 62 and straining ring 68. However, it is now visible that latch 70 juts slightly behind ring sector 71 and in this manner forms a positive-locking connection. This also applies to any other connections of this type. Ring flange 69 of target pipe 12 lies in recess 68a o" straining ring 68. Straining screw 76 is tightened, and retention pin 78 now lies within slit 73. In the interior of rotatable target pipe 12 is fojnd - as in Figures 1 to 4 as well - a non-rotating magnetic system, not shown here, under whose, lines of electric flux target pipe 12 runs through in operation. Supports and lines for the magnetic system and its coolant run through support shaft 6 until target pipe 12, but are likewise not showr here. Reference list: We Claim: 1. A cathode device for atomizing a target pipe (12) having a non-rotatable magnetic means (23) for generating a magnetic field to contain a plasma, in which the target pipe (12) is rotatable within a vacuum chamber right through the magnetic field, in which at least one load-bearing structure (1), a movable support shaft (6) for the target pipe (12) is arranged, within the target pipe (12), a fixing device for the magnetic means (23) is arranged and in which at least one detachable coupling arrangement for changing the target pipe (12) is arranged between the support shaft (6) and the target pipe (12), characterized in that at least between the movable support shaft (6) and the target pipe (12), a separator (15,67) coaxial thereto and two detachable points of separation respectively are arranged, and in that the torsionally rigid and dimensionally stable connections between the supporting shaft (6) and the separator (15,67) on the one hand, and between the separator (15,67) and the target pipe (12) on the other hand are detachable and recoverable through the points of separation. 2. The cathode device as claimed in claim 1, wherein the first point of separation (32) is arranged between a ring flange (6) on the support shaft (6) and the separator (15), and wherein the second point of separation (53) is arranged between the separator (15) and the interior of the target pipe (12). 3. The cathode device as claimed in claim 1, wherein a) the support shaft (6) within the vacuum chamber is provided with a ring flange (8) having a first positive-locking element (11), b) between the ring flange (8) and the target pipe (12), the separator (15) is surrounded by a first one-piece straining ring (16) having a second positive-locking element (17), through which the separator (15) is twistable coaxially and torque-resistant against the ring flange (8) of the support shaft (6). 4. The cathode device as claimed in claim 1, wherein the separator (15) is surrounded by a second one-piece straining ring (18), which in the opposite direction to the first straining ring (8) can be placed on radially movable sleeves (36a) of an expander (36) for operation, through which the appropriate end of the target pipe (12) is twistable coaxially and torque-resistant with the separator (15). 5. The cathode device as claimed in claim 1, wherein the first positive- locking element (11) is designed as a coaxial annular gap in the ring flange (8) and the second positive-locking element (17) is designed on the outer circumference of the ring flange (8). 6. The cathode device as claimed in claim 1, wherein the ring flange (8) of the support shaft (6) exhibits a coaxial recess for the axial and radial positive-locking insertion of a coaxial and ring-shaped ring extension (15b) on the end of the separator (15) far from the target. 7. The cathode device as claimed in claim 6, wherein the separator (15) has a ring flange (15a) that projects outwards, on which the ring extension (15b) is arranged. 8. The cathode device as claimed in claim 7, wherein the separator (15) on which the side turned away from the ring flange (15b) exhibits a ring- shaped stop face (15h) for the first straining ring (16). 9. The cathode device as claimed in claim 1, wherein the separator (15) has on its side turned toward the target pipe (12) an external thread (15f) for the second straining ring (18), through which a radial expander (36) is twistable against an inner surface of the target pipe (12). 10. The cathode device as claimed in claim 9, wherein the radial expander (36) exhibits at least three; sector-pattern sleeves (36a) with inner truncated cone surfaces. 11. The cathode device as claimed in claim 9, wherein the sectors of the sleeves (36a) are held in a contractible manner through an outer annular spring (37). 12. The cathode device as claimed in at least one of claims 8 to 10, wherein a thrust collar (35) is arranged between the second straining ring (18) and the expander (36), the thrust collar having an outer truncated cone surface (35a) that is at least complementary to a large extent to the truncated cone surfaces of the sleeves (36a). 13. The cathode device as claimed in claim 1, wherein the first straining ring (8) exhibits a ring-shaped recess as a positive-locking element (11) for the ring flange (15a) of the separator (15) for connecting the separator (15) with the support shaft (6) on the side turned toward the target pipe (12). 14. The cathode device as claimed in at least one of claims 1 to 4, wherein the two straining rings (16,18) are surrounded by a darkroom screen (27). 15.The cathode as claimed in one of claims 1 to 4, wherein a first pipe (20) is arranged in the interior of support shaft (6), a second pipe (21) in the interior of the separator (15), and a third pipe (22) in the interior of the target pipe (12) for holding the magnetic system (23), in which the two pipes (20,21) are connected to one another through an axially detachable, but torque-resistant plug-type connection (34). 16. The cathode device as claimed in one of Claims 1 to 4, wherein at least the straining ring (18) is provided on its circumference with boreholes (18a) for inserting a tool. 17. The cathode device as claimed in claim 4, wherein the straining ring (18) is provided on its circumference with boreholes (18b), into which the support bodies (48) are put n for the stationary support of the darkroom screen (27) on the rotatable straining ring (18). 18. The cathode device as claimed in claim 1, wherein a) a first driven pipe is designed as a support shaft (6), which ends in the vacuum chamber, and which on this end supports a coaxial separator (67), made up of a ring flange (62), a hub (63) and a thrust piece (64), b) the hub (63) has a semi-annular recess for the thrust piece (64) complementary thereto, and this thrust piece (64) may be twisted in a non-positive and torque-resistant manner against the support shaft (6), c) the hub (63) is connected to a ring flange (62), which on its circumference supports at least one latch (70) for catching into a ring sector (71) of an axially following straining ring (68), d) the straining ring (68) having on its circumference at least one ring sector (71) for the positive-locking overlap over the latch (70), and wherein e) the target pipe (12) has a ring flange (69) that sticks out radially outwards, which in connecting the ring flange (62) and straining ring (68) between these can be clamped so that the target pipe (12) can turn along. 19. The cathode device as claimed in claim 18, wherein the straining ring (68) encompassing the target pipe (12) has on its circumference at least one fork part (72) having a tangentially orientated slit (73), into which a retention pin (18) rotatably fastened on the ring flange (62) may be inserted. 20. The cathode device as claimed in claim 19, wherein the ring flange (62) has on its circumference at least one overhang (74) having a screw hole (75), into which a straining screw (76) may be screwed in while interconnecting a ring (77) and the retention pin (78) runs radially to the straining screw (76), but tangentially to the circumference of the ring flange (62). The invention relates to a cathode device for atomizing a target pipe (12) having a non-rotatable magnetic means (23) for generating a magnetic field to contain a plasma, in which the target pipe (12) is rotatable within a vacuum chamber right through the magnetic field, in which at least one load-bearing structure (1), a movable support shaft (6) for the target pipe (12) is arranged, within the target pipe (12), a fixing device for the magnetic means (23) is arranged and in which at least one detachable coupling arrangement for changing the target pipe (12) is arranged between the support shaft (6) and the target pipe (12). At least between the movable support shaft (6) and the target pipe (12), a separator (15,67) coaxial thereto and two detachable points of separation respectively are arranged, and in that the torsionally rigid and dimensionally stable connections between the supporting shaft (6) and the separator (15,67) on the one hand, and between the separator (15,67) and the target pipe (12) on the other hand are detachable and recoverable through the points of separation.

Documents:

00687-kol-2005-abstract.pdf

00687-kol-2005-claims.pdf

00687-kol-2005-description complete.pdf

00687-kol-2005-drawings.pdf

00687-kol-2005-form 1.pdf

00687-kol-2005-form 2.pdf

00687-kol-2005-form 3.pdf

00687-kol-2005-form 5.pdf

687-KOL-2005-FORM-27.pdf

687-kol-2005-granted-abstract.pdf

687-kol-2005-granted-assignment.pdf

687-kol-2005-granted-claims.pdf

687-kol-2005-granted-correspondence.pdf

687-kol-2005-granted-description (complete).pdf

687-kol-2005-granted-drawings.pdf

687-kol-2005-granted-examination report.pdf

687-kol-2005-granted-form 1.pdf

687-kol-2005-granted-form 13.pdf

687-kol-2005-granted-form 18.pdf

687-kol-2005-granted-form 2.pdf

687-kol-2005-granted-form 26.pdf

687-kol-2005-granted-form 3.pdf

687-kol-2005-granted-form 5.pdf

687-kol-2005-granted-form 6.pdf

687-kol-2005-granted-priority document.pdf

687-kol-2005-granted-reply to examination report.pdf

687-kol-2005-granted-specification.pdf

abstract-00687-kol-2005.jpg