| Abstract |
An apparatus for fixing an electrode (31) of plasma polymerization apparatus is provided, which comprise; a processing chamber (21); a vacuum pump (5) for maintaining vacuum in the chamber (21), for discharging at high voltage; an apparatus for fixing the electrode (31) which fixes the electrode (31); and a power supply (3) for applying electric power to the electrode (31), wherein the apparatus for fixing the electrode (31) includes: an electrode holder part (34,35) made of insulating material, for covering and fixing the end of the electrode(31);a lead line part (46)passing through the electrode holder part (34,35)for electrically connecting the electrode (31) and the power supply (3); a fixing part (47)for fixing the electrode holder part (34,35)in a proper position in the chamber (21); and an elastic part (68)for providing an elastic force in the longitudinal direction of the electrode (31). Therefore, the apparatus for fixing the electrode (31) can prevent transformation of the electrode (31). |