Title of Invention

APPARATUS AND METHOD FOR TRANSFERRING A PATTERN FROM A TEMPLATE

Abstract

Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104; 105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114;116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template. The apparatus further includes a heater device having a surface facing said spacing, for heating either fluid layer (14). (Fig. 9)

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0567-che-2005-abstract.pdf

0567-che-2005-claims.pdf

0567-che-2005-correspondnece-others.pdf

0567-che-2005-correspondnece-po.pdf

0567-che-2005-description(complete).pdf

0567-che-2005-drawings.pdf

0567-che-2005-form 1.pdf

0567-che-2005-form 3.pdf

0567-che-2005-form 5.pdf

0567-che-2005-form9.pdf