Title of Invention

"A PROCESS FOR THE PURIFICATION OF SULFURIC ACID FOR SEMICONDUCTORS"

Abstract This invention relates to a process for the purification of sulfuric acid which comprises in the step of distillation of commercial grade sulfuric acid characterised in that is distillation under high vacuum and pressure of 0.001 mm Hg at a temperature of 200°-300°C.
Full Text

Documents:

965-del-1999-abstract.pdf

965-del-1999-claims.pdf

965-del-1999-complete specification (granted).pdf

965-del-1999-correspondence-others.pdf

965-del-1999-correspondence-po.pdf

965-del-1999-description (complete).pdf

965-del-1999-description (provisional).pdf

965-del-1999-form-1.pdf

965-del-1999-form-19.pdf

965-del-1999-form-2.pdf

965-del-1999-form-26.pdf

965-del-1999-form-3.pdf

965-del-1999-form-4.pdf

965-del-1999-form-5.pdf


Patent Number 209464
Indian Patent Application Number 0965/DEL/1999
PG Journal Number 40/2007
Publication Date 05-Oct-2007
Grant Date 30-Aug-2007
Date of Filing 13-Jul-1999
Name of Patentee THE SECRETARY, DEPARTMENT OF ELECTRONICS, GOVERNMENT OF INDIA,
Applicant Address ELECTRONICS NIKETAN (GROUND FLOOR), 6, CGO COMPLEX, LODHI ROAD, NEW DELHI-110003.
Inventors:
# Inventor's Name Inventor's Address
1 URLAGADDALA RAMBABU CENTRE FOR MATERIALS FOR ELECTRONICS TECHNOLOGY, DEPARTMENT OF ELECTRONICS, GOVERNMENT OF INDIA, PANCHAWATI, OFF PASHAN ROAD, PUNE-411 008, MAHARASHTRA.
2 RAWINDRA SHARWAN SONAWANE CENTRE FOR MATERIALS FOR ELECTRONICS TECHNOLOGY, DEPARTMENT OF ELECTRONICS, GOVERNMENT OF INDIA, PANCHAWATI, OFF PASHAN ROAD, PUNE-411 008, MAHARASHTRA.
3 PAWAN KUMAR KHANNA CENTRE FOR MATERIALS FOR ELECTRONICS TECHNOLOGY, DEPARTMENT OF ELECTRONICS, GOVERNMENT OF INDIA, PANCHAWATI, OFF PASHAN ROAD, PUNE-411 008, MAHARASHTRA.
PCT International Classification Number C07C 29/136
PCT International Application Number N/A
PCT International Filing date
PCT Conventions:
# PCT Application Number Date of Convention Priority Country
1 NA